Effects of Some Additives and Interfaces on Crystallization of Amorphous Si<SUB>3</SUB>N<SUB>4</SUB> Thin Films
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چکیده
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architecture and engineering of nanoscale sculptured thin films and determination of their properties
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ژورنال
عنوان ژورنال: Hyomen Kagaku
سال: 1984
ISSN: 0388-5321,1881-4743
DOI: 10.1380/jsssj.5.129